发明名称 IMPROVED RESISTANCE HEATER FOR DIAMOND PRODUCTION BY CVD
摘要 A plural substrate CVD apparatus for diamond crystal production utilizes spaced apart vertical, parallel, planar substrate panels with an electrical (direct current, D.C.) resistance filament heater therebetween. A hydrogen-hydrocarbon gas mixture flows between panels to come into contact with the heater and the panels to cause diamond crystal nucleation and growth on the substrate panels. The apparatus includes means for maintaining the spaced relationship of the heater from the substrate surfaces, comprising a rod member attached to one end of the heater and tensioned by a cable passing over a pulley member and attached to a weight.
申请公布号 SE8902775(D0) 申请公布日期 1989.08.18
申请号 SE19890002775 申请日期 1989.08.18
申请人 GENERAL ELECTRIC COMPANY 发明人 T R * ANTHONY
分类号 H05B3/06;C23C16/27;C23C16/44;C30B25/02;C30B25/10;C30B29/04;H05B3/62 主分类号 H05B3/06
代理机构 代理人
主权项
地址