| 摘要 |
PURPOSE:To eliminate an electric loss and to avoid an open pattern due to Joule's heat by utilizing a superconducting thin film for a microstrip line. CONSTITUTION:A ceramic raw material 1 is rinsed and a metallic foil 6 with a required pattern formed thereto is clad to the outer circumferential face of the ceramics raw material 1, superconducting powder or strip is supplied to an ultrahigh temperature plasma equipment and the material is jetted from the nozzle to the ceramics raw material 1 with a required interval to form the microstrip line 2 made of a superconducting thin film onto the surface of the ceramics raw material 1. Then a 'Teflon(R)' base 4 whose one side has copper foil 5 is laminated to both sides of the ceramics while clipping an adhesives 3 by heating and press-bonding to obtain a multi-layer microstrip line. Then a conductive thin film with excellent uniformity is obtained on the surface of the ceramics. |
