XY DRIVING MECHANISM,申请号JP19880031594-传众专利搜索

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发明名称	XY DRIVING MECHANISM
摘要
申请公布号	JPH01206637(A)	申请公布日期	1989.08.18
申请号	JP19880031594	申请日期	1988.02.13
申请人	SHINKAWA LTD	发明人	SUZUKI YASUNOBU;NISHIMURA AKIHIRO;SATO KIMIHARU
分类号	H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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