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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01206634(A)
申请公布日期
1989.08.18
申请号
JP19880030751
申请日期
1988.02.15
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
NISHIUMA MASAHIKO;TSUBOI TOSHIHIRO
分类号
H01L23/44;H01L21/52;H01L23/02;H01L23/04
主分类号
H01L23/44
代理机构
代理人
主权项
地址
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