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发明名称
PROBE APPARATUS EQUIPPED WITH PROBE CARD AUTOMATIC REPLACING FUNCTION
摘要
申请公布号
JPH01206270(A)
申请公布日期
1989.08.18
申请号
JP19880030220
申请日期
1988.02.12
申请人
TOKYO ELECTRON LTD
发明人
ABE YUICHI
分类号
G01R31/00;H01L21/66
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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