| 摘要 |
PURPOSE:To circulate a gas flow stably, and to improve the efficiency of laser oscillation in high repetition frequency by forming a path circulating a laser medium between a pair of main discharge electrodes into an approximately annular shape and arranging an energy supply means at a position where the gas flow of the laser medium circulating through the path is not prevented. CONSTITUTION:In an excimer laser device 1, a conductive support member 23 is installed to an insulating substrate 4, and a main discharge electrode 2 is mounted at the central section of the nose of the support member 23 and spare ionization electrodes 6 at both end sections of the nose of the support member 23. A main discharge electrode 3 is set up faced oppositely to the main discharge electrode 2 on a conductive substrate 5. Peaking capacitors 8 are fitted onto the sidewalls of conductive walls 21, and spare ionization electrodes 7 are attached on the sides reverse to the conductive walls 21. The peaking capacitors 8, the spare ionization electrodes 6, 7 and the main discharge electrode 2 are arranged approximately along the lower end positions of the conductive walls 21 in the conductive walls 21. Accordingly, a path 26 circulating the gas flow of a laser medium by a blower 24 is formed into an approximately annular shape, thus resulting in no prevention of the gas flow in the upper section of the path 26. |
