发明名称 Photometer
摘要 The invention relates to a photometer, in particular for the measurement or control of light intensities in plasma processes. In this case, the light to be measured or controlled is fed via an optical fibre (23) to a light chopper (26) and compared, displaced in time, with a second light source, which is, for example, a reference light source (29) having pulsed light. This comparison can be achieved by means of quotient formation and be carried out by means of an analog divider circuit (34, 35, 43, 45). This divider circuit (34, 35, 43, 45) makes it possible to process a signal with high accuracy over four decades, referred to the amplitude of the signal. The output signal obtained by the proportioning is used for the control of a process in which the light brightness of one or more spectral lines is influenced. <IMAGE>
申请公布号 DE3803840(A1) 申请公布日期 1989.08.17
申请号 DE19883803840 申请日期 1988.02.09
申请人 LEYBOLD AG, 6450 HANAU, DE 发明人 DICKEN, WILFRIED, DIPL.-PHYS., 6480 WAECHTERSBACH, DE;STUERMER, JOHANN, 6463 FREIGERICHT, DE;THORN, GERNOT, DIPL.-ING., 6450 HANAU, DE;ZIPF, UWE, 6463 FREIGERICHT, DE
分类号 G01J1/16 主分类号 G01J1/16
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