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发明名称
METHOD AND APPARATUS FOR CLEANING SURFACE OF SOLID
摘要
申请公布号
JPH01204426(A)
申请公布日期
1989.08.17
申请号
JP19880027473
申请日期
1988.02.10
申请人
NEC CORP
发明人
AOTO NAOMI
分类号
B08B7/04;C30B25/02;H01J61/00;H01L21/02;H01L21/304
主分类号
B08B7/04
代理机构
代理人
主权项
地址
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