FILLING UP OF CONTACT HOLE,申请号JP19880030653-传众专利搜索

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发明名称	FILLING UP OF CONTACT HOLE
摘要
申请公布号	JPH01205525(A)	申请公布日期	1989.08.17
申请号	JP19880030653	申请日期	1988.02.12
申请人	SONY CORP	发明人	HAYASHI HISAO
分类号	H01L21/28;H01L21/3205	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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