REDUCTION PROJECTION ALIGNER,申请号JP19880030241-传众专利搜索

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发明名称	REDUCTION PROJECTION ALIGNER
摘要
申请公布号	JPH01205419(A)	申请公布日期	1989.08.17
申请号	JP19880030241	申请日期	1988.02.10
申请人	NEC CORP	发明人	YAMANAKA YOJI
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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