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发明名称
AN EXPOSURE APPARATUS
摘要
申请公布号
EP0295860(A3)
申请公布日期
1989.08.16
申请号
EP19880305405
申请日期
1988.06.14
申请人
CANON KABUSHIKI KAISHA
发明人
TORIGOE, MAKOTO;SUZUKI, AKIYOSHI
分类号
G03F9/00;(IPC1-7):H01L21/30;H01L21/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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