| 摘要 |
PURPOSE:To form minute patterns efficiently with high precision by forming an antihalation coating on a base plate and rinsing a resist layer contg. a specified polymer formed on said antihalation coating after irradiating with excimer laser through a pattern mask. CONSTITUTION:An antihalation coating is executed on a base plate, and a resist layer contg. a polymer having 10,000-300,000 number average mol.wt. expressed in terms of polystyrene and structure units expressed by formula I and 0.3-15wt.% total halogen content is formed on said antihalation coating. The resist layer is irradiated with excimer laser through a pattern mask, and then developed and rinsed. In formula I, each X, Y1, and Y2 is a halogen atom; each R<1>-R<5> is 1-3C haloalkyl group, etc., or 1-3C haloalkoxy group. Thus, minute patterns are formed efficiently with high precision. |
