Method for manufacturing terminal contacts for thin-film magnetic heads

摘要

Method for manufacturing terminal contacts for thin-film magnetic heads. The method of manufacturing reinforced terminal contacts for thin-film magnetic heads provides a photolithographic process sequence that allows the technical requirements to be kept as low as possible and that reduces the gold consumption to a minimum. To that end, a copper layer for contact reinforcement fashioned as a tower is electrodeposited in contact windows formed by a photoresistive layer, which is electrodeposited onto an electrically conductive permalloy layer of a substrate before this is completely structured and has been provided with a protective aluminum oxide layer. A gold film required for the attachment of a bonding wire is finally deposited either directly preceding the protection or following the application of the aluminum oxide on the copper layer.