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经营范围
发明名称
METHOD FOR OPERATING CRYOPUMP
摘要
申请公布号
JPH01201465(A)
申请公布日期
1989.08.14
申请号
JP19880025000
申请日期
1988.02.05
申请人
HITACHI METALS LTD
发明人
ICHIKAWA KOJI
分类号
C23C14/22;C23C14/24
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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