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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH01201483(A)
申请公布日期
1989.08.14
申请号
JP19880025919
申请日期
1988.02.05
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
YAMAZAKI SHUNPEI;HAMAYA TOSHIJI
分类号
C23C16/50;C23C16/26;C23C16/27;H01L21/205
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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