MANUFACTURE OF COLOR SEPARATION FILTER

摘要

PURPOSE:To improve the size accuracy and alignment accuracy of an etching mask corresponding to respective color filters by forming a 3rd color filter which is obtained from the overlap part of 1st and 2nd color filters protected by 1st and 2nd etching prevention films of on a substrate. CONSTITUTION:The 1st color filter 4 is formed on the substrate 1 and the 1st etching prevention film 7 is formed on the surface; and the 2nd color filter 8 is formed and the 2nd etching prevention film 10 is formed on the substrate. Etching is carried out to remove the 2nd color filter 8 and 1st color filter 10 continuously and also removes the 1st and 2nd etching prevention films 7 and 10. Consequently, the 1st color filter 4 and the 3rd color filter consisting of the overlap of the 1st color filter 4 and 2nd color filter 8 are arranged on the substrate 1 while the high size accuracy and alignment accuracy are maintained.