| 摘要 |
<p>PURPOSE:To easily adjust a crossed axes angle by providing a rotation adjusting mechanism for relatively moving first and second moving planes to make the crossed axes angle in the moving direction a predetermined angle. CONSTITUTION:First, by tacking clamping screws 26 for fixing a main table 22 and a supporting table 23 together, a grid base board for adjusting crossed axes angle is placed on and fixed to a chuck. A motor is driven in this condition to move the chuck by a defined quantity and by observing the position of the grid by means of a microscope, the deviation of an X direction from a right angle is obtained with a Y direction as the reference. After that, based on this information, the supporting table 23 is rotated centering around a pin 85 by means of the push screw 72 or draw screw 73 of a rotation adjusting portion 70 to make the deviation of the grid zero. By fastening the clamping screws 26, when the main table 22 and the supporting table 23 are completely fixed together, the adjustment of the crossed axes angle can be completed.</p> |
