ROTARY MIRROR OPTICAL DEFLECTOR

摘要

PURPOSE:To enable extremely fast rotation by supporting a rotary shaft to which a rotary mirror is added by a journal bearing consisting of a dynamic air bearing supported by an elastic body or/and a viscoelastic body. CONSTITUTION:The rotor 13 of a motor and the rotary magnet 4 of a magnetic bearing are fitted to the rotary shaft 12 fitted with the rotary mirror 11. The rotary shaft 12 is supported by one nonarc type dynamic pressure air type journal bearing 18 each above and below, i.e. two bearings in total, and further received by several elastic bodies 19 such as springs connected to a casing 15. The viscous body 20 such as oil and grease is put between the casing 15 and journal bearing 18, so the vibration energy of the rotary shaft is eliminated here. Consequently, the rotary shaft never contacts the bearing even in case of large vibration at a resonance point and the extremely fast rotary mirror optical deflector is obtained.