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发明名称
ELEMENT ISOLATION OF MOLECULAR DEVICE
摘要
申请公布号
JPH01200645(A)
申请公布日期
1989.08.11
申请号
JP19880025243
申请日期
1988.02.05
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L21/762;H01L21/312;H01L21/76;H01L27/12;H01L29/78;H01L29/786;H01L51/05
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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