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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH01198475(A)
申请公布日期
1989.08.10
申请号
JP19880022463
申请日期
1988.02.02
申请人
ANELVA CORP
发明人
SEKIGUCHI ATSUSHI;KOBAYASHI TSUKASA;TAKAGI SHINJI
分类号
C23C16/06;C23C16/42;C23C16/50;H01L21/205
主分类号
C23C16/06
代理机构
代理人
主权项
地址
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