| 摘要 |
PURPOSE:To enable the highly sensitive measurement of an excitation level on a solid-state surface, by setting the intensity of vacuum ultraviolet laser light at a value whereat the pumping rate thereof exceeds a relaxation time of energy of an electron excited to a non-occupation level. CONSTITUTION:Laser light generated in a vacuum ultraviolet light generating chamber 12 and made to enter a vacuum ultraviolet spectroscope 13 is rid of a fundamental wave and only short wavelength light thereof is introduced into an ultra-high vacuum electron spectroscope 14. Being matched with a time of irradiation of a sample 15 by this short wavelength light, a wavelength-variable laser light for surface excitation is generated from a wavelength-variable laser oscillator 16 through a timing control 10 and applied to the sample 15 and thereby electrons in a solid-state surface are excited to a non-occupation level. The electrons emittted from the surface of the sample 15 are detected by an electron energy analyzer 17 and an electron detector 18, counted by an electron counting device 21 and sent to a computer 20, where the state of the electrons in the solid-state surface is measured. Then, the intensity of the vacuum ultraviolet laser light is set at a value whereat the pumping rate thereof exceeds a relaxation time of energy of an electron excited to the non-occupation level. |
