DRY-ETCHING PROCESS AND DEVICE THEREOF,申请号JP19880022777-传众专利搜索

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发明名称	DRY-ETCHING PROCESS AND DEVICE THEREOF
摘要
申请公布号	JPH01199430(A)	申请公布日期	1989.08.10
申请号	JP19880022777	申请日期	1988.02.04
申请人	OKI ELECTRIC IND CO LTD	发明人	KANAMORI JUN
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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