发明名称 |
In situ differential imaging and method utilizing a scanning electron microscope. |
摘要 |
<p>The operating characteristics of an SEM apparatus are enhanced by carrying out in situ deflection during electron beam scanning of an object to be examined. Differential signals derived from the in situ deflection are a direct measure of the spatial derivative of any geometric or material variations on the surface of the scanned object.</p> |
申请公布号 |
EP0327167(A2) |
申请公布日期 |
1989.08.09 |
申请号 |
EP19890200175 |
申请日期 |
1989.01.27 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
SICIGNANO, ALBERT;VAEZ-IRAVANI, MEHDI |
分类号 |
G01N23/22;G21K5/04;H01J37/147;H01J37/22;H01J37/244;H01J37/28 |
主分类号 |
G01N23/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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