| 摘要 |
PURPOSE:To detect minute shapes of the edge part, the end face, a hole, a groove, a projection, etc. of a face to be detected, by condensing the light of an optical fiber for illumination on the face to be detected and reflecting this light and spreading the reflected light and scanning the reflected light focused on one end of an optical fiber. CONSTITUTION:An optical fiber 14 for detection, an optical fiber 17 for illumination, SELFOC lenses 18 and 19, a prism 22, etc. are incorporated in an outside cylinder 11 and inside cylinders 12 and 16 to constitute an optical sensor 10. The light for illumination from the optical fiber 17 is condensed on a face 7 to be detected by the SELFOC lens 18, and the reflected light reflected from the face 7 is spread toward the SELFOC lens 19 by the prism 22 and is focused on the tip of the inside cylinder 12, and this focused reflected light is detected by the optical fiber 14. In this constitution, the inside cylinder 16 is directed to the face 7 to be detected to scan it, thereby detecting the accurate shape of the face 7 to be detected. |
