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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01198034(A)
申请公布日期
1989.08.09
申请号
JP19880024455
申请日期
1988.02.03
申请人
NEC YAMAGATA LTD
发明人
ISHIZAKI KATSUTOSHI
分类号
H01L21/316;H01L21/31
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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