VAPOUR PHASE EPITAXY METHOD,申请号JP19880024518-传众专利搜索

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发明名称	VAPOUR PHASE EPITAXY METHOD
摘要
申请公布号	JPH01198035(A)	申请公布日期	1989.08.09
申请号	JP19880024518	申请日期	1988.02.03
申请人	FUJITSU LTD	发明人	MARUYAMA KENJI
分类号	H01L21/365	主分类号	H01L21/365
代理机构		代理人
主权项
地址

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