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发明名称
HORIZONTAL PLASMA CVD APPARATUS
摘要
申请公布号
JPH01198016(A)
申请公布日期
1989.08.09
申请号
JP19880024454
申请日期
1988.02.03
申请人
NEC YAMAGATA LTD
发明人
SUGAWARA ICHIRO
分类号
C30B25/02;C23C16/44;C23C16/455;C23C16/50;H01L21/205;H01L21/31
主分类号
C30B25/02
代理机构
代理人
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地址
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