发明名称 Developing apparatus
摘要 In a developing apparatus according to the present invention, a supply path of a developing solution is formed in a cup member which constitutes a dip tank of the developing solution so that the spraying pressure of the developing solution is not directly applied to an object to be processed. As a result, uniform, high-quality images can be developed on an entire area of the object.
申请公布号 US4855775(A) 申请公布日期 1989.08.08
申请号 US19880184806 申请日期 1988.04.22
申请人 TOKYO ELECTRON LIMITED 发明人 MATSUOKA, FUMINORI
分类号 H01L21/30;G03D5/04;G03F7/30;H01L21/027 主分类号 H01L21/30
代理机构 代理人
主权项
地址