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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH01196836(A)
申请公布日期
1989.08.08
申请号
JP19880022238
申请日期
1988.02.02
申请人
FUJI ELECTRIC CO LTD
发明人
KIRISAWA MITSUAKI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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