| 摘要 |
PURPOSE:To improve the reliability of a substrate by providing a wet roller, an air bubble inhibitor supply pipe, a dam formed below the pipe, a means for the supply of an air bubble inhibitor and a plurality of air bubble inhibitor supply holes on the aforesaid pipe, respectively at a temporary frame mounting position prior to the carriage of the substrate. CONSTITUTION:There are provided wet rollers 31A and 31B for applying an air bubble inhibitor (water) to a substrate 11, water supply pipes 32A and 32B in parallel to the rollers 31A and 31B, flexible dams 35A and 35B fitted in contact with the lower pats of the pipes 32A and 32B, and a means for water supply to the pipes 32A and 32B, respectively at the temporary frame mounting position of a substrate carriage device prior to the carriage of the substrate 11. Also, the pipes 32A and 32B are provided with a plurality of water supply holes in a lengthwise direction. According to the aforesaid construction, the whole areas of the rollers 31A and 31B are supplied with water area the substrate 11 is applied with water before carried to the temporary frame mounting position. It is possible, therefore, to obtain proper adherence between the surface of a conductor layer and a laminated film, and prevent an occurrence of an air bubble in a space between the bonding surfaces thereof. |
