| 摘要 |
PURPOSE:To detect and measure the magnetism in a narrow place such as a measure of a magnetic scale or the like, by using a small-sized and flat magnetostrictive material easy to mold to convert electrically the change of magnetostriction and detecting it. CONSTITUTION:An SmFe as a magnetostrictive material 1 is formed to a plate having 0.03mm. thickness, and a ZPT film as a piezoelectric material 2 having 0.02mm. thickness is vapor-deposited to this plate, thus constituting a head which detects a voltage signal due to piezoelectric conversion when a pressure due to magnetostriction is applied. With respect to a magnetic scale 5 for detection, an Fe-Cr-Co material having surface magnetic flux density 150G is used, and magnetic measures are magnetized vertically (in the direction of thickness) with 0.8mu width at 2mu pitches. When the head constituted in this manner is brought into contact with the magnetic scale softly and is moved to perform the detection, the detection signal is a 6mV change signal, and the sensitivity is high. |
