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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH01196837(A)
申请公布日期
1989.08.08
申请号
JP19880021276
申请日期
1988.02.02
申请人
FUJITSU LTD
发明人
INOUE NORIYUKI
分类号
H01L21/324;H01L21/205;H01L21/22;H01L21/31
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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