| 摘要 |
<p>PURPOSE:To achieve a measurement, by providing an optical element which is transparent to infrared rays and has a press-fit surface of a s ample at a position shifted by an infrared transmissible length toward the sample from the focus of a microscope to compress the sample enough into the thickness to transmit infrared rays at the focus thereof. CONSTITUTION:In a reflection mode measurement, as incoming infrared rays 5a are incident on a Cassegrain type objective lens from above, they are reflected with a convex mirror 1 and a concave mirror 2 to be incident on a sample 3 passing through an optical element 6. The optical element 5 is fixed on an optical element holding shaft 7 in such a manner that a press-fit surface 6a of the sample is positioned above the focus of a microscope. So, when focus is adjusted with the sample 3 sandwiched between the optical element 6 and a substrate 4, the sample 3 is compressed below 10mum in the thickness with the optical element 6 so as to admit the infrared rays 15. In a transmission mode measurement, the infrared rays are incident into the sample 3 through the substrate 4. Here, when the optical element 6 is fixed on the optical element holding shaft 7 in such a manner that the press-fit surface 6a of the sample is positioned above the focus of the microscope, with the focusing, the sample is compressed with the optical element 6 below 10mum thereby allowing infrared rays to penetrate through the sample 3.</p> |
