| 摘要 |
PURPOSE:To manufacture a ceramic heater of a complicated form by sintering a substance to be sintered, wherein powder paste of a metal IV or VA group is buried between a pair of metal Si pressed powder molded substances under an N2 atmosphere for forming a sintered substance to be given hot hydrostatic treatment. CONSTITUTION:A substance to be sintered, wherein powder paste 3 of a metal IV A or VA group is buried between a pair of metal Si pressed powder molded substances 2 and 2', is sintered under an N2 atmosphere to form a sintered substance for being given hot hydrostatic treatment. Accordingly, at the time of sintering, metal IV A group or VA group powder paste 3 reacts to N2 to generate a conductive nitride, on the other hand, the metal Si pressed powder molded substances 2 and 2' are nitrided by N2 so as to obtain silicon nitride (Si3N4) ceramics by reaction sintering. Thereby, a ceramic heater 1 of a complicated form can be obtained. |
