发明名称 DEVICE FOR CORRECTING WHITE-SPOT DEFECT OF PHOTOMASK
摘要 PURPOSE:To automatically correct a deviation of the optical axis of laser light by measuring the intensity of the laser light with a photodetector after the laser light passes through a slit and discriminating the deviation from the variation of the intensity, and then, rotating an already provided mirror or newly provided transparent glass plate. CONSTITUTION:A photodetector 25 is provided immediately after a mirror 8 which is provided on the laser light axis and can transmit about 10% of the laser light and the intensity of the laser light shaped by a variable slit 5 is measured with the photodetector 25. The signal of the photodetector 25 is compared with a reference value at a control circuit 26 and a motor driver 27 is controlled in accordance with the difference between them. The motor driver 27 is composed of a circuit which drives two sets of motors and can rotate mirrors 28 and 29 independently from each other and a deviation of the laser light axis can be corrected without man's hands. Therefore, even if the laser light axis deviates, the deviation can be discriminated and automatically corrected.
申请公布号 JPH01195451(A) 申请公布日期 1989.08.07
申请号 JP19880018553 申请日期 1988.01.30
申请人 NEC CORP 发明人 YOSHINO YOICHI
分类号 G01B21/00;G02B5/08;G03F1/00;H01L21/027;H01L21/30 主分类号 G01B21/00
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