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发明名称
FLATTENING METHOD
摘要
申请公布号
JPH01196127(A)
申请公布日期
1989.08.07
申请号
JP19880020715
申请日期
1988.01.30
申请人
SONY CORP
发明人
YAMAGUCHI TOSHIHIRO;TSUKADA SABURO;TADA MASAHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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