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发明名称
SINGLE SEMICONDUCTOR SUBSTRATE TREATMENT APPARATUS
摘要
申请公布号
JPH01194326(A)
申请公布日期
1989.08.04
申请号
JP19880017114
申请日期
1988.01.29
申请人
TOSHIBA CORP
发明人
NIBARI IKUO
分类号
H01L21/304;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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REFRIGERATOR
