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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01194433(A)
申请公布日期
1989.08.04
申请号
JP19880019981
申请日期
1988.01.29
申请人
NEC KYUSHU LTD
发明人
IMAMURA TORU
分类号
G01R31/26;H01L21/66;H01L21/822;H01L27/04;H01L29/78
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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