Device for coating a substrate with a material obtained from a plasma

摘要

The invention relates to a device for coating a substrate (1) with a material obtained from a plasma, the substrate being situated between a first and a second electrode (5, 6). In this arrangement, the first electrode (5) is connected to a first terminal (8) of an alternating-current (a.c.) source (9), while the second electrode (6) is connected to a second terminal (11) of the said alternating-current source (9). <IMAGE>