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发明名称
SCANNING ELECTRON BEAM EXPOSURE SYSTEM
摘要
申请公布号
EP0083246(B1)
申请公布日期
1989.08.02
申请号
EP19820306994
申请日期
1982.12.30
申请人
FUJITSU LIMITED
发明人
YASUDA, HIROSHI;TSUCHIKAWA, HARUO;MIYAZAKI, TAKAYUKI
分类号
H01J37/305;H01J37/30;H01J37/302;H01L21/027
主分类号
H01J37/305
代理机构
代理人
主权项
地址
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