ENZYME SENSOR AND METHOD OF MANUFACTURE SAME

摘要

An enzyme sensor includes an enzyme-fixed membrane directly coating the ion-sensitive membrane of an ISFET. Embodiments include an enzyme sensor in which the ISFET is fabricated using a sapphire substrate, an enzyme sensor using an insulated-gate ISFET, and an enzyme sensor coated with an enzyme-fixed membrane to a thickness of 3 - l00 mu m by means of a spin coating process. Methods of manufacturing these enzyme sensors are provided.