| 摘要 |
PURPOSE:To execute an automatic inspection by providing an optical position sensor on X and Y axes, measuring alternately positions of the X and Y axes of fibers of a measuring instrument side and a side to be inspected by said sensor and eliminating a relative difference of positions of both the fibers. CONSTITUTION:Output waveforms of X and Z axes of a measuring instrument side, namely, waveforms t1, t3 extending from end faces of optical position sensors 13, 14 to a measuring instrument side optical fiber 16 are selected by an optical sensor output selecting circuit 22, and subsequently, a measuring instrument side select switch 25 is turned ON, values of t1, t3 are inputted to an AND gate 24 and a pulse from a pulse oscillation circuit 20 is sampled by t1, t3 portions, counted by a counter 1 through the AND gate 24 and stored. In the same way, output waves t2, t4 of a material 17 to be inspected side are also stored in a counter 2. After having counted these output wavelength lengths t1-t4, shifts t1-t2 in the X axis direction from a reference position and shifts t3-t4 in the Z axis direction are calculated by a subtracting circuit 29 and outputted as a difference of the number of pulses, and by driving pulse motors 8, 15 of the X and Z axes, positions of the X and Z axes of the material to be inspected 17 are allowed to coincide with the fiber 16, and next, positioning of the Y axis is also executed in the same way. |
