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经营范围
发明名称
GROWING METHOD FOR POLYCRYSTALLINE SILICON
摘要
申请公布号
JPH01191413(A)
申请公布日期
1989.08.01
申请号
JP19880014745
申请日期
1988.01.27
申请人
NEC CORP
发明人
NAKAYA TSUNEJI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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