Sputtering process and an apparatus for carrying out the same,申请号US19870137562-传众专利搜索

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发明名称	Sputtering process and an apparatus for carrying out the same
摘要
申请公布号	US4853102(A)	申请公布日期	1989.08.01
申请号	US19870137562	申请日期	1987.12.24
申请人	HITACHI, LTD.	发明人	TATEISHI, HIDEKI;SAITO, HIROSHI;SASAKI, SHINJI;HORIUCHI, MITSUAKI
分类号	C23C14/35;H01J37/32;H01J37/34	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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