| 摘要 |
PURPOSE:To miniaturize the shape and to decrease the weight further avoiding the pollution of any optical parts by lubricant by substituting a turboblower for conventional blower as well as a magnetic bearing for the bearing of blower. CONSTITUTION:A turboblower 15 is substituted for a route blower while a centrifugal turbine 16 is driven at an rotational speed of several scores of thousands RPM by a rotor 17 and stator 18 constituting a motor mounted on a shaft. Thus, the volume and weight of the turboblower 15 is decreased in inverse proportion to the speed compared with that of the route blowers which rotate at lower speeds. Furthermore, a magnetic bearing is used to hold a shaft 24, besides, a controller and an auxiliary bearing to control the axle core of the shaft 24 receiving signals from sensors 21, 22 are provided. Through these procedures, the blower can be miniaturized reducing the weight thereof thereby miniaturizing the whole device further avoiding the pollution of any optical parts by the oil content of lubricant. |
