| 摘要 |
PURPOSE:To observe a sample with irregularities by mounting a deflector on an electrode to extract secondary electrons upward, feeding primary electrons to the deflection center of the deflector, and separating orbits of primary electrons and secondary electrons. CONSTITUTION:An electron beam 1 is focused by an objective lens 2 and radiated to the center of a deflector 4 through an opening 13 and radiates a sample 5 after being deflected by the magnetic field H generated by the deflector 4. Secondary electrons 6 emitted by the radiation of the electron beam 1 are absorbed and accelerated by an accelerating electrode 3 applied with the positive potential 7 and deflected by the deflector 4 then pass a grid 12 and proceed to a detector. Deflection directions of the electron beam 1 and the secondary electrons 6 are opposite, both orbits are separated, the back side not facing the detector or the recess portion of the sample with irregularities can be precisely observed. |
