| 摘要 |
PURPOSE:To enhance the controllability of an elevationally driving device by elevationally driving a bonding arm via a voice coil type linear motor, thereby accelerating it with a simple structure. CONSTITUTION:A bonding arm 12 which has one end at a capillary 15, to which a wire 14 is inserted, is rotatably supported to a supporting shaft 13 via a supporting block 11, and secured to a bonding head 10. A voice coil 16 is secured to the other end of the arm 12, and the coil 16 is engaged with a central pole 17a of a permanent magnet 17 secured to the head 10. Thus, a voice coil type linear motor 18 which elevationally drives the arm 12 is composed of the coil 16 and the magnet 17. The position of the origin of the capillary 15 is detected by a differential photoelectric detector 19. The motor 18 is driven by a motor- driven power amplifier, and the motor 18 is stably operated by applying speed feedback to the amplifier. |
