发明名称 MANUFACTURE OF WIRE WITH BALL FOR BALL BONDING
摘要 PURPOSE:To obtain an aluminum alloy wire with a ball of a regular spherical shape, by eliminating the production of air stream in a discharging region while a spark discharge is occurring. CONSTITUTION:A wire 1 of aluminum or aluminum alloy is supplied through a capillary 2 toward a discharging electrode 4. The wire 1 and the electrode 4 are connected to a power source 6. It is preferred to set the wire 1 to negative to the electrode 4. A discharging region is formed in a container 5, and inert gas shield is sealed in the container 5. The composition of the gas is adjusted via gas valves 9, 10, it is particularly preferred that 2-15vol.% of hydrogen and 1-10vol.% of oxygen are contained. The air flow to the discharging region is eliminated, and a spark discharge is produced between the wire 1 and the electrode 4. The discharge continuing time is set to a value equal to or less than 3msec. In this manner, a ball of regular spherical shape is formed at the end of aluminum or aluminum alloy wire.
申请公布号 JPS58199532(A) 申请公布日期 1983.11.19
申请号 JP19820081392 申请日期 1982.05.17
申请人 HITACHI SEISAKUSHO KK 发明人 OONUKI HITOSHI;SUWA MASATERU;KOIZUMI MASAHIRO;MIYAKE HIROSHI;SATOU AKIRA
分类号 H01L21/60 主分类号 H01L21/60
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