发明名称 CAPILLARY
摘要 PURPOSE:To eliminate crack, cutout, wear of a leading end by growing a diamond film at a position in contact with a gold wire or aluminum pad. CONSTITUTION:A diamond film 1 is grown by a CVD method on the end of a ceramic capillary 2. Thus, the capillary having high hardness, high thermal conductivity and high electric insulation and chemical resistance of diamond characteristics is obtained.
申请公布号 JPH01189132(A) 申请公布日期 1989.07.28
申请号 JP19880014259 申请日期 1988.01.25
申请人 SEIKO EPSON CORP 发明人 HIRABAYASHI MITSUO
分类号 H01L21/60 主分类号 H01L21/60
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