发明名称 Apparatus for lifting silicon wafers, in particular
摘要 The apparatus is noteworthy in that it is shaped in order to permit the positioning and the centering of a basket receiving the wafers in an ordered manner, so that a part of the base of the said wafers is capable of interacting with a movable member 2 suitable for displacement in translation and angularly, while being arranged in order to raise only some wafers, through an angular pivoting effect of the said member. <IMAGE>
申请公布号 FR2626261(A1) 申请公布日期 1989.07.28
申请号 FR19880001261 申请日期 1988.01.26
申请人 RECIF SA 发明人 BERNARD POLI;GERARD CHINCHOLLE
分类号 H01L21/677;H01L21/00;H01L21/673 主分类号 H01L21/677
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