发明名称 |
Apparatus for lifting silicon wafers, in particular |
摘要 |
The apparatus is noteworthy in that it is shaped in order to permit the positioning and the centering of a basket receiving the wafers in an ordered manner, so that a part of the base of the said wafers is capable of interacting with a movable member 2 suitable for displacement in translation and angularly, while being arranged in order to raise only some wafers, through an angular pivoting effect of the said member. <IMAGE>
|
申请公布号 |
FR2626261(A1) |
申请公布日期 |
1989.07.28 |
申请号 |
FR19880001261 |
申请日期 |
1988.01.26 |
申请人 |
RECIF SA |
发明人 |
BERNARD POLI;GERARD CHINCHOLLE |
分类号 |
H01L21/677;H01L21/00;H01L21/673 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|